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  • Semiconductor Targets
    Semiconductor Targets


    High Purity Aluminum & Aluminum Alloy Targets

    Materials: Al, Al30ppmSi, Al0.5Si, Al0.75Si, Al0.8Si, Al1Si, Al0.5Cu and AlSiCu etc.

    Purity: 4N ~ 5N5 (99.99% ~ 99.9995%)

    Grain Size and Orientation: Upon Customer’s Demands

    Highlight: Various customized long life targets available


    High Purity Titanium Targets and Coils

    Purity: 4N5 ~ 5N (99.995% ~ 99.999%), Low oxygen Titanium

    Grain Size and Orientation: Upon Customer’s Demands

    Highlight: Various customized long life targets and coils available


    High Purity Cu and Cu Alloy Targets, Cu coils and Cu Anode

    Purity: 4N (99.99%), 4N5 (99.995%), 5N (99.999%), 6N (99.9999%) and CuAl alloy

    High purity Cu Anode and CuP Anode

    High purity Cu coil

    Grain Size and Orientation: Upon Customer’s Demands

    Highlight: Various customized long life targets and Anode materials


    High Purity Tantalum and Tantalum Alloy Targets and Tantalum Coils

    Ta target and coil Purity: 3N ~ 5N (99.9% ~ 99.999%)

    Grain Size and Orientation: Upon Customer’s Demands

    Highlight: Various customized long life targets and coils available

    Coil refurbish services are available for the most effective cost saving for our customers.


    All kinds of special metal sputtering targets, including:

    High purity W, Ti-W, Ni, Ni alloy, Cr and Coetc.